Title

Synthetic incoherence for electron microscopy

Document Type

Article

Publication Title

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Publication Date

1-1-2007

Abstract

Tomographic studies of submicrometer samples in materials science using electron microscopy have been inhibited by diffraction effects. In the present work, we describe a practical method for ameliorating these effects. First, we find an analytic expression for the mutual coherence function for hollow-cone illumination. Then, we use this analytic expression to propose a Gaussian weighting of hollow-cone illumination, which we name tapered solid-cone illumination, and present an analytic expression for its mutual coherence function. Finally, we investigate numerically an n-ring approximation to tapered solid-cone illumination. The results suggest a method for removing diffraction effects and hence enabling tomography. © 2007 Optical Society of America.

Volume

24

Issue

8

First Page

2402

Last Page

2406

DOI

10.1364/JOSAA.24.002402

ISSN

10847529

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